XPS/Auger Spectrometer (CAF)
The Surface Analysis Laboratory has a Kratos AXIS 165 Multitechnique Electron Spectometer
acquired through the NSF Academic Research Infrastructure Grant (DMR-9512264, September
1995). AXIS 165 is equipped with both standard dual (Mg/Al) anode and
monochromatic (Al) X-ray sources for XPS analysis and imaging; a 15 keV electron gun
for AES analysis and Auger or secondary electron imaging; and a 5 keV ion gun for sputter
depth profile, sample surface cleaning and sputter depositon. The electron energy
analyzer is a 165 mm mean radius concentric hemispherical analyzer equipped with 8
channeltron detectors. Instrument control, data acquisition and data analysis are
performed through the Kratos Vision 1.5 software.